Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11161280 | Strain and kinetics control during separation phase of imprint process | Niyaz Khusnatdinov, Frank Y. Xu, Michael Nevin Miller, Ecron D. Thompson, Gerard Schmid +3 more | 2021-11-02 |
| 11104057 | Imprint apparatus and method of imprinting a partial field | Wei Zhang, Byung-Jin Choi, Zhengmao Ye | 2021-08-31 |
| 11073758 | Imprint apparatus control, control method and manufacturing method | Niyaz Khusnatdinov | 2021-07-27 |
| 11054739 | Imprint apparatus, control method, imprint method and manufacturing method | Niyaz Khusnatdinov | 2021-07-06 |
| 11020894 | Safe separation for nano imprinting | Se-Hyuk Im, Mahadevan GanapathiSubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid +4 more | 2021-06-01 |
| 10996560 | Real-time correction of template deformation in nanoimprint lithography | Anshuman Cherala, Byung-Jin Choi | 2021-05-04 |
| 10996561 | Nanoimprint lithography with a six degrees-of-freedom imprint head module | Seth J. Bamesberger, Jeremy Lee Sevier, Byung-Jin Choi, Philip D. Schumaker | 2021-05-04 |