Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181490 | Small-angle x-ray scatterometry | Alex Dikopoltsev, Matthew Wormington, Alexander Krokhmal | 2021-11-23 |
| 10976268 | X-ray source optics for small-angle X-ray scatterometry | Matthew Wormington, Alexander Krokhmal | 2021-04-13 |
| 10976269 | Wafer alignment for small-angle x-ray scatterometry | Alexander Krokhmal, Asher Peled, Guy Sheaffer, Matthew Wormington | 2021-04-13 |