Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10976269 | Wafer alignment for small-angle x-ray scatterometry | Yuri Vinshtein, Alexander Krokhmal, Guy Sheaffer, Matthew Wormington | 2021-04-13 |
| 10976270 | X-ray detection optics for small-angle X-ray scatterometry | Matthew Wormington, Alexander Krokhmal | 2021-04-13 |