Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181490 | Small-angle x-ray scatterometry | Matthew Wormington, Yuri Vinshtein, Alexander Krokhmal | 2021-11-23 |
| 11169099 | Method and apparatus for X-ray scatterometry | Alex Krokhmal, Juri Vinshtein | 2021-11-09 |