Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114330 | Substrate support having customizable and replaceable features for enhanced backside contamination performance | Dave Shaner | 2021-09-07 |
| 11011397 | Wafer soak temperature readback and control via thermocouple embedded end effector for semiconductor processing equipment | — | 2021-05-18 |
| 10903097 | In-situ wafer temperature measurement and control | Ronald N. Reece, Petros Miltiades Kopalidis | 2021-01-26 |