Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903097 | In-situ wafer temperature measurement and control | John F. Baggett, Petros Miltiades Kopalidis | 2021-01-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903097 | In-situ wafer temperature measurement and control | John F. Baggett, Petros Miltiades Kopalidis | 2021-01-26 |