PK

Petros Miltiades Kopalidis

AT Axcelis Technologies: 1 patents #7 of 15Top 50%
📍 Swampscott, MA: #9 of 27 inventorsTop 35%
🗺 Massachusetts: #4,998 of 14,123 inventorsTop 40%
Overall (2021): #304,299 of 548,734Top 60%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10903097 In-situ wafer temperature measurement and control John F. Baggett, Ronald N. Reece 2021-01-26