DS

Dave Shaner

AT Axcelis Technologies: 1 patents #7 of 15Top 50%
🗺 Massachusetts: #4,998 of 14,123 inventorsTop 40%
Overall (2021): #479,340 of 548,734Top 90%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11114330 Substrate support having customizable and replaceable features for enhanced backside contamination performance John F. Baggett 2021-09-07