Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11016395 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Peng Liu, Rafael C. Howell, Roshni Biswas | 2021-05-25 |
| 10996565 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Peng Liu, Ya Luo, Yu Cao | 2021-05-04 |
| 10948831 | Methods of determining process models by machine learning | Ya Luo, Yu Cao, Jen-Shiang Wang | 2021-03-16 |