Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996565 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Peng Liu, Yu Cao, Yen-Wen Lu | 2021-05-04 |
| 10948831 | Methods of determining process models by machine learning | Yu Cao, Jen-Shiang Wang, Yen-Wen Lu | 2021-03-16 |