Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983440 | Selection of substrate measurement recipes | Jay Jianhui Chen | 2021-04-20 |
| 10948831 | Methods of determining process models by machine learning | Ya Luo, Yu Cao, Yen-Wen Lu | 2021-03-16 |