Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11054750 | Profile aware source-mask optimization | Duan-Fu Stephen Hsu, Feng-Liang Liu | 2021-07-06 |
| 11016395 | Methods of determining scattering of radiation by structures of finite thicknesses on a patterning device | Yu Cao, Yen-Wen Lu, Peng Liu, Roshni Biswas | 2021-05-25 |
| 10990003 | Binarization method and freeform mask optimization flow | Duan-Fu Stephen Hsu, Jingjing Liu, Xingyue PENG | 2021-04-27 |