Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150565 | Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method | Rene Marinus Gerardus Johan Queens | 2021-10-19 |
| 10915689 | Method and apparatus to correct for patterning process error | Peter Ten Berge, Everhardus Cornelis Mos, Richard Johannes Franciscus Van Haren, Peter Hanzen Wardenier, Erik Weber Jensen +5 more | 2021-02-09 |