Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092902 | Method and apparatus for detecting substrate surface variations | Johannes F. M. D'Achard Van Enschut, Tamara Druzhinina, Nitish Kumar, Sarathi ROY, Yang-Shan Huang +3 more | 2021-08-17 |
| 11036128 | Membrane assembly | Derk Servatius Gertruda Brouns, Paul Janssen, Mohammad Reza KAMALI, Mária Péter, Willem Joan Van Der Zande +2 more | 2021-06-15 |
| 10983431 | Pellicle and pellicle assembly | David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more | 2021-04-20 |
| 10908496 | Membrane for EUV lithography | Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more | 2021-02-02 |