Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099487 | Method and apparatus for optimization of lithographic process | Marc Hauptmann, Everhardus Cornelis Mos, Weitian Kou, Alexander Ypma, Michiel Kupers +1 more | 2021-08-24 |