Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175591 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara +3 more | 2021-11-16 |
| 11099487 | Method and apparatus for optimization of lithographic process | Marc Hauptmann, Everhardus Cornelis Mos, Weitian Kou, Alexander Ypma, Hyunwoo Yu +1 more | 2021-08-24 |
| 10908512 | Methods of controlling a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Daan Maurits Slotboom | 2021-02-02 |