Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11003095 | Positioning system and lithographic apparatus | Krijn Frederik Bustraan, Yang-Shan Huang, Antonius Franciscus Johannes De Groot, Minkyu Kim, Jasper Anne Frido Marikus Simons +1 more | 2021-05-11 |