Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175593 | Alignment sensor apparatus for process sensitivity compensation | Simon Reinald HUISMAN, Tamer Elazhary, Yuxiang Lin, Vu Quang TRAN, Sebastianus Adrianus GOORDEN +4 more | 2021-11-16 |
| 11156928 | Alignment mark for two-dimensional alignment in an alignment system | Gerrit Johannes Nijmeijer, Junqiang Zhou, Piotr Jan Meyer, Jeffrey John Lombardo | 2021-10-26 |
| 10928738 | Adaptive filter for in-line correction | Eric Brian Catey, Robert Anthony Augelli, Sergey MALYK | 2021-02-23 |