Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156928 | Alignment mark for two-dimensional alignment in an alignment system | Junqiang Zhou, Piotr Jan Meyer, Jeffrey John Lombardo, Igor Matheus Petronella Aarts | 2021-10-26 |
| 11054751 | Apparatus with a sensor and a method of performing target measurement | Hong Ye | 2021-07-06 |