Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069510 | Substrate processing apparatus | Ki Chul Um, Hyun Soo Jang, Jeong Ho Lee | 2021-07-20 |
| 11001925 | Substrate processing apparatus | Young-Hoon Kim, Dae Youn Kim, Hyun Soo Jang, Jeong Ho Lee | 2021-05-11 |
| 10950432 | Method of depositing thin film and method of manufacturing semiconductor device | Young-Hoon Kim, Dae Youn Kim, Tae Hee Yoo, Wan Gyu Lim, Jin Geun Yu | 2021-03-16 |
| 10934619 | Gas supply unit and substrate processing apparatus including the gas supply unit | Young-Hoon Kim, Dae Youn Kim, Hyun Soo Jang, Jeong Ho Lee | 2021-03-02 |