Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11001925 | Substrate processing apparatus | Young-Hoon Kim, Yong Gyu Han, Hyun Soo Jang, Jeong Ho Lee | 2021-05-11 |
| 10950432 | Method of depositing thin film and method of manufacturing semiconductor device | Young-Hoon Kim, Yong Gyu Han, Tae Hee Yoo, Wan Gyu Lim, Jin Geun Yu | 2021-03-16 |
| 10934619 | Gas supply unit and substrate processing apparatus including the gas supply unit | Young-Hoon Kim, Yong Gyu Han, Hyun Soo Jang, Jeong Ho Lee | 2021-03-02 |