Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195845 | Substrate processing method and device manufactured by the same | Yoon Ki Min, Yong Min Yoo | 2021-12-07 |
| 10950432 | Method of depositing thin film and method of manufacturing semiconductor device | Young-Hoon Kim, Yong Gyu Han, Dae Youn Kim, Wan Gyu Lim, Jin Geun Yu | 2021-03-16 |