Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069510 | Substrate processing apparatus | Ki Chul Um, Jeong Ho Lee, Yong Gyu Han | 2021-07-20 |
| 11001925 | Substrate processing apparatus | Young-Hoon Kim, Yong Gyu Han, Dae Youn Kim, Jeong Ho Lee | 2021-05-11 |
| 10934619 | Gas supply unit and substrate processing apparatus including the gas supply unit | Young-Hoon Kim, Yong Gyu Han, Dae Youn Kim, Jeong Ho Lee | 2021-03-02 |