Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11136665 | Shadow ring for modifying wafer edge and bevel deposition | Dale Du Bois, Mohamad A. Ayoub, Robert W. Kim, Amit Kumar BANSAL, Mark Fodor +6 more | 2021-10-05 |
| 11009455 | Precursor delivery system and methods related thereto | Zubin Huang, Sarah White, Jonathan Bakke, Diwakar Kedlaya, Fang Ruan | 2021-05-18 |