Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101115 | Ring removal from processing chamber | Nicholas Michael Kopec, Andreas Schmid | 2021-08-24 |
| 10968052 | Long reach vacuum robot with dual wafer pockets | Rajkumar Thanu | 2021-04-06 |
| 10964584 | Process kit ring adaptor | Leon Volfovski, Andreas Schmid, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan +3 more | 2021-03-30 |