Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714332 | Film forming method and film forming apparatus | Takayuki Karakawa, Toyohiro KAMADA, Akihiro Kuribayashi, Takeshi Oyama, Jun Ogawa +3 more | 2020-07-14 |
| 10626496 | Film forming apparatus, method of cleaning film forming apparatus, and storage medium | Takayuki Karakawa, Jun Ogawa, Yasuo Kobayashi | 2020-04-21 |
| 10573512 | Film forming method | Takeshi Oyama | 2020-02-25 |