Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10626496 | Film forming apparatus, method of cleaning film forming apparatus, and storage medium | Takayuki Karakawa, Jun Ogawa, Noriaki Fukiage | 2020-04-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10626496 | Film forming apparatus, method of cleaning film forming apparatus, and storage medium | Takayuki Karakawa, Jun Ogawa, Noriaki Fukiage | 2020-04-21 |