Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804078 | Plasma processing apparatus and gas introduction mechanism | Yutaka Fujino, Tomohito Komatsu, Taro Ikeda, Takeo Wakutsu | 2020-10-13 |
| 10557200 | Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate | Taro Ikeda, Shigeru Kasai, Emiko HARA, Yutaka Fujino, Yuki Osada +1 more | 2020-02-11 |