Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10557200 | Plasma processing device with shower plate having protrusion for suppressing film formation in gas holes of shower plate | Taro Ikeda, Shigeru Kasai, Yutaka Fujino, Yuki Osada, Jun NAKAGOMI +1 more | 2020-02-11 |