Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870919 | Gas supply method and film forming method | Katsumasa Yamaguchi, Kensaku Narushima, Kouichi SEKIDO | 2020-12-22 |
| 10612143 | Raw material gas supply apparatus and film forming apparatus | Eiichi KOMORI | 2020-04-07 |