Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10870919 | Gas supply method and film forming method | Katsumasa Yamaguchi, Hironori Yagi, Kouichi SEKIDO | 2020-12-22 |
| 10872814 | Film forming method and film forming apparatus | Takanobu HOTTA, Atsushi Matsumoto | 2020-12-22 |
| 10829854 | Film forming method | Katsumasa Yamaguchi | 2020-11-10 |