Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10612143 | Raw material gas supply apparatus and film forming apparatus | Hironori Yagi | 2020-04-07 |
| 10526702 | Film forming apparatus | Daisuke Toriya, Manabu Amikura | 2020-01-07 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10612143 | Raw material gas supply apparatus and film forming apparatus | Hironori Yagi | 2020-04-07 |
| 10526702 | Film forming apparatus | Daisuke Toriya, Manabu Amikura | 2020-01-07 |