Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867854 | Double plug method for tone inversion patterning | — | 2020-12-15 |
| 10854453 | Method for reducing reactive ion etch lag in low K dielectric etching | Christopher Cole, Andrew Metz | 2020-12-01 |
| 10748769 | Methods and systems for patterning of low aspect ratio stacks | Elliott Franke, Sophie Thibaut | 2020-08-18 |
| 10727057 | Platform and method of operating for integrated end-to-end self-aligned multi-patterning process | Robert D. Clark, Richard A. Farrell, Kandabara Tapily, Sophie Thibaut | 2020-07-28 |
| 10580660 | Gas phase etching system and method | Subhadeep Kal, Nihar Mohanty, Aelan Mosden, Scott Lefevre | 2020-03-03 |