Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761434 | Substrate holding apparatus, exposure apparatus, and article manufacturing method | Shunya Sakata, Noboru Osaka | 2020-09-01 |
| 10620762 | Input device, control method for input device, and non-transitory computer readable storage medium storing input device control program | — | 2020-04-14 |