Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761434 | Substrate holding apparatus, exposure apparatus, and article manufacturing method | Shunya Sakata, Akihiro Takahashi | 2020-09-01 |
| 10698319 | Exposure apparatus, exposure method, and article manufacturing method | — | 2020-06-30 |