Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761434 | Substrate holding apparatus, exposure apparatus, and article manufacturing method | Akihiro Takahashi, Noboru Osaka | 2020-09-01 |
SS
Shunya Sakata
Overall (2020): #273,707 of 565,922Top 50%
1
Patents 2020