Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748788 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Brent Schwab, Gregory P. Thomes, Kevin Rolf, Jeffrey M. Lauerhaas | 2020-08-18 |
| 10748789 | Systems and methods for treating substrates with cryogenic fluid mixtures | Jeffery W. Butterbaugh, David S. Becker | 2020-08-18 |