Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748788 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Brent Schwab, Chimaobi W. Mbanaso, Gregory P. Thomes, Jeffrey M. Lauerhaas | 2020-08-18 |