Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10843236 | Systems and methods for rotating and translating a substrate in a process chamber | — | 2020-11-24 |
| 10748789 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso, David S. Becker | 2020-08-18 |