Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809613 | Mask for EUV lithography and method of manufacturing the same | — | 2020-10-20 |
| 10747103 | Pellicle fabrication methods and structures thereof | Hsuan-Chen Chen, Chih-Cheng Lin, Hsin-Chang Lee, Yao-Ching Ku, Wei-Jen Lo +3 more | 2020-08-18 |
| 10670959 | Pellicle and method of using the same | Chue-San Yoo, Hsin-Chang Lee, Pei-Cheng Hsu | 2020-06-02 |
| 10534256 | Pellicle assembly and method for advanced lithography | Amo Chen, Ta-Cheng Lien, Hsin-Chang Lee, Chih-Cheng Lin, Jeng-Horng Chen | 2020-01-14 |