Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859915 | Adhesion layer for multi-layer photoresist | Chen-Yu Liu, Tzu-Yang Lin, Ching-Yu Chang, Chin-Hsiang Lin | 2020-12-08 |
| 10649339 | Resist material and method for forming semiconductor structure using resist layer | Chen-Yu Liu, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2020-05-12 |
| 10527941 | Extreme ultraviolet photoresist and method | Chen-Yu Liu, Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2020-01-07 |