Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879051 | Method for controlling exposure region in bevel etching process for semiconductor fabrication | Chun-Hsing Wu, Chih-Ching Cheng, Yi-Wei Chiu, Kun-Cheng Chen | 2020-12-29 |
| 10847349 | Moving focus ring for plasma etcher | Yu-Chi Lin, Yi-Wei Chiu, Chin-Hsing Lin | 2020-11-24 |
| 10707123 | Etch profile control of interconnect structures | Allen Ke, Yi-Wei Chiu, Yu-Wei Kuo | 2020-07-07 |
| 10679891 | Methods of forming interconnect structures using a vacuum environment | Chia-Ching Tsai, Yi-Wei Chiu, Li-Te Hsu | 2020-06-09 |
| 10566232 | Post-etch treatment of an electrically conductive feature | Bo-Jhih Shen, Yi-Wei Chiu | 2020-02-18 |
| 10529543 | Etch process with rotatable shower head | Yu-Chi Lin, Yi-Wei Chiu, Chin-Hsing Lin, Yu Lun Ke | 2020-01-07 |