Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847349 | Moving focus ring for plasma etcher | Yu-Chi Lin, Yi-Wei Chiu, Hung Jui Chang | 2020-11-24 |
| 10529543 | Etch process with rotatable shower head | Yu-Chi Lin, Yi-Wei Chiu, Hung Jui Chang, Yu Lun Ke | 2020-01-07 |