Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879051 | Method for controlling exposure region in bevel etching process for semiconductor fabrication | Chun-Hsing Wu, Hung Jui Chang, Chih-Ching Cheng, Yi-Wei Chiu | 2020-12-29 |