Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861709 | Method of evaluating impurity gettering capability of epitaxial silicon wafer and epitaxial silicon wafer | Satoshi Shigematsu, Ryosuke OKUYAMA | 2020-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861709 | Method of evaluating impurity gettering capability of epitaxial silicon wafer and epitaxial silicon wafer | Satoshi Shigematsu, Ryosuke OKUYAMA | 2020-12-08 |