Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10850365 | Polishing apparatus with a waste liquid receiver | Junichi Ueno, Kaoru Ishii, Yosuke KANAI, Yuya Nakanishi | 2020-12-01 |
| 10737365 | Turn table transport carriage | Yosuke KANAI | 2020-08-11 |
| 10661410 | Method for measuring template and method for evaluating same | — | 2020-05-26 |
| 10537972 | Polishing method and polishing apparatus | Junichi Ueno, Kaoru Ishii | 2020-01-21 |
| 10532442 | Polishing apparatus and wafer polishing method | Junichi Ueno, Kaoru Ishii, Hiromi Kishida, Yuya Nakanishi, Ryosuke Yoda +1 more | 2020-01-14 |