Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10850365 | Polishing apparatus with a waste liquid receiver | Michito Sato, Junichi Ueno, Yosuke KANAI, Yuya Nakanishi | 2020-12-01 |
| 10537972 | Polishing method and polishing apparatus | Junichi Ueno, Michito Sato | 2020-01-21 |
| 10532442 | Polishing apparatus and wafer polishing method | Michito Sato, Junichi Ueno, Hiromi Kishida, Yuya Nakanishi, Ryosuke Yoda +1 more | 2020-01-14 |