Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10850365 | Polishing apparatus with a waste liquid receiver | Michito Sato, Junichi Ueno, Kaoru Ishii, Yosuke KANAI | 2020-12-01 |
| 10532442 | Polishing apparatus and wafer polishing method | Michito Sato, Junichi Ueno, Kaoru Ishii, Hiromi Kishida, Ryosuke Yoda +1 more | 2020-01-14 |