Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10591819 | Monomer, polymer, resist composition, and patterning process | Masahiro Fukushima, Koji Hasegawa, Jun Hatakeyama, Kazuhiro Katayama | 2020-03-17 |
| 10527939 | Monomer, polymer, resist composition, and patterning process | Masahiro Fukushima, Koji Hasegawa, Jun Hatakeyama, Kazuhiro Katayama | 2020-01-07 |