Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754248 | Sulfonium salt, resist composition, and patterning process | Takayuki Fujiwara, Ryo MITSUI | 2020-08-25 |
| 10709245 | Article falling prevention device | — | 2020-07-14 |
| 10591819 | Monomer, polymer, resist composition, and patterning process | Masahiro Fukushima, Masayoshi Sagehashi, Koji Hasegawa, Jun Hatakeyama | 2020-03-17 |
| 10527939 | Monomer, polymer, resist composition, and patterning process | Masahiro Fukushima, Masayoshi Sagehashi, Koji Hasegawa, Jun Hatakeyama | 2020-01-07 |